DLS-1100 深階暫態光譜儀

Name: DLS-1100 深階暫態光譜儀
Brand: Semilab

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DLS-1100 深階暫態光譜儀 — 深階暫態光譜

DLS-1100 是一款專為半導體研發與生產環境設計的高階 DLTS 系統。其具備用於精確溫度控制的外接低溫恆溫器，並提供頂級的靈敏度、全自動化與進階客製化功能，為生產實驗室、晶圓代工廠與高通量研究設施的理想選擇。

DLS-1100 深階暫態光譜儀

Analytical Tools for the Characterization of Power Devices

作者: H-J. Schulze, A. Frohnmeyer, F-J. Niedernostheide, B. Simmnacher, B.O. Kolbesen, P. Tüttő, T. Pavelka, G. Wachutka

主題: transition metals; contamination; carrier lifetime; silicon defect density

閱讀文獻

Applied Surface Science,70/71, 391-3951993

Ballistic Electron Emission Microscopy of Schottky Diodes on RF-Plasma-Treated Silicon

作者: L. Quattropani, K. Solt, P. Niedermann, I. Maggio-Aprile, O. Fischer, T. Pavelka

主題: Schottky diode; RF plasma treated silicon

閱讀文獻

Semicond. Sci. Technol., 5, 1100-11041990

DLTS Investigation of Deep Levels in Bulk GaAs under Uniaxial Stress

作者: C.A. Londos, T. Pavelka

主題: DLTS; GaAs

閱讀文獻

Journal of the Electrochemical Society 146 1999) 37731999

Diffusion of Iron in Silicon Dioxide

作者: D.A. Ramappa, W.B. Henley

主題: diffusion; iron; silicon dioxide

閱讀文獻

Applied Surface Science 379 2016) 3042016

Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers

作者: Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers

主題: GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED

閱讀文獻

Materials Science Forum Vols.38-41, 803-808

Interpretation of the Electric Field Dependent Thermal Emission Data of Deep Traps

作者: T. Pavelka and G. Ferenczi

主題: Thermal emission; deep trap

閱讀文獻

Journ. of Crystal Growth, 210, 116-1212000

Investigation of Deep Levels and Precipitates Related to Molybdenum in Silicon by DLTS and Scanning Infrared Microscopy

作者: B. Sandhu, T. Ogikubo, H. Goto, V. Csapó, T. Pavelka

主題: DLTS; SIRM; Silicon (Si); Mo; Fe; deep levels; carrier lifetime

閱讀文獻

International Conference on Frontiers of Characterization and Metrology, 20072007

NIST Traceable Small Signal Surface Photo Voltage Reference Wafer

作者: A. Bertuch, K. Steeples

主題: NIST traceable; surface photovoltage; standard; reference wafer; Electric measurements; Electrical resistivity; Metrology; Epitaxy; Silicon (Si)

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Materials Science in Semiconductor Processing2024

Quantitative shear stress imaging in high throughput in-line Si wafer inspection

作者: Zsolt Kovács, Csanád Ö. Boros, Teodóra N. Kovács, Zsolt Kovács, ZoltánT. Kiss

主題: optical inspection; Silicon (Si); POLARIZED INFRARED IMAGING; VISUAL INSPECTION

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Materials Science Forum Vols. 38-41, 469-4721989

Temperature Dependence of the Capture Cross Section of Seo as Measured by Microwave Absorption Spectroscopy (MAS)

作者: T. Pavelka and B. Hemm

主題: Microwave Absorption Spectroscopy

閱讀文獻

Appl.Phys.Letters 91, 0331102007

Three Dimensional Mapping of Thermal and Tunneling Electron Emission from InAs/GaAs Quantum Dots

作者: O. Engström, M.Kaniewska, W.Jung, M.Kaczmarczyk

主題: Deep level transient spectroscopy; quantum dots; tunneling; conduction bands; electric field

閱讀文獻

DLS-1100 深階暫態光譜儀

Deep-level Transient Spectroscopy for Wafer Inspection

2025年8月18日

Interpreting QD Properties with Deep-Level Transient Spectroscopy

2025年10月17日

The Latest Semiconductor Industry Trends And Semilab’s Contribution To The Market

2025年8月18日

DLS-1100 深階暫態光譜儀

DLS-1100 深階暫態光譜儀 — 深階暫態光譜

相關文獻

Analytical Tools for the Characterization of Power Devices

Ballistic Electron Emission Microscopy of Schottky Diodes on RF-Plasma-Treated Silicon

DLTS Investigation of Deep Levels in Bulk GaAs under Uniaxial Stress

Diffusion of Iron in Silicon Dioxide

Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers

Interpretation of the Electric Field Dependent Thermal Emission Data of Deep Traps

Investigation of Deep Levels and Precipitates Related to Molybdenum in Silicon by DLTS and Scanning Infrared Microscopy

NIST Traceable Small Signal Surface Photo Voltage Reference Wafer

Quantitative shear stress imaging in high throughput in-line Si wafer inspection

Temperature Dependence of the Capture Cross Section of Seo as Measured by Microwave Absorption Spectroscopy (MAS)

Three Dimensional Mapping of Thermal and Tunneling Electron Emission from InAs/GaAs Quantum Dots

相關白皮書

Deep-level Transient Spectroscopy for Wafer Inspection

Interpreting QD Properties with Deep-Level Transient Spectroscopy

The Latest Semiconductor Industry Trends And Semilab’s Contribution To The Market

What You Need To Know About Using Deep Level Transient Spectroscopy In Semiconductor Manufacturing

DLS-1100 深階暫態光譜儀

DLS-1100 深階暫態光譜儀 — 深階暫態光譜

相關文獻

Analytical Tools for the Characterization of Power Devices

Ballistic Electron Emission Microscopy of Schottky Diodes on RF-Plasma-Treated Silicon

DLTS Investigation of Deep Levels in Bulk GaAs under Uniaxial Stress

Diffusion of Iron in Silicon Dioxide

Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers

Interpretation of the Electric Field Dependent Thermal Emission Data of Deep Traps

Investigation of Deep Levels and Precipitates Related to Molybdenum in Silicon by DLTS and Scanning Infrared Microscopy

NIST Traceable Small Signal Surface Photo Voltage Reference Wafer

Quantitative shear stress imaging in high throughput in-line Si wafer inspection

Temperature Dependence of the Capture Cross Section of Seo as Measured by Microwave Absorption Spectroscopy (MAS)

Three Dimensional Mapping of Thermal and Tunneling Electron Emission from InAs/GaAs Quantum Dots

相關白皮書

Deep-level Transient Spectroscopy for Wafer Inspection

Interpreting QD Properties with Deep-Level Transient Spectroscopy

The Latest Semiconductor Industry Trends And Semilab’s Contribution To The Market

What You Need To Know About Using Deep Level Transient Spectroscopy In Semiconductor Manufacturing