1999 • ASTM Conference on Gate Dielectric Oxide Integrity, 1999

COCOS (Corona Oxide Characterization of Semiconductor) Metrology: Physical Principles and Applications

主題

COCOScoronaInterface Trapstress induced leakage currentiron contaminationContact Potential Difference (CPD)

M. Wilson, J. Lagowski, A. Savtchouk, L. Jastrzebski, J. D'Amico

歡迎洽詢產品資訊與報價

針對您的研究需求，提供專業諮詢與客製化解決方案