Determination of implant activation and junction leakage with a non-penetrating and non-damaging elastic material probe (EM-Probe)

發表於: International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling (INSIGHT-2007), May 6 - 9, 2007, Napa, California

年: 2007

作者: R.J. Hillard, M. Benjamin, J.O. Borland

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