1999 • ALTECH 99: analytical techniques for semiconductor materials and process characterization

New COCOS (Corona Oxide Characterization of Semiconductor) Method for Monitoring the Reliability of Thin Gate Oxides

主題

COCOSInterface structuresurface treatmentCorona effectVoltage current curvereliabilityOxide layerDefect detectionComparative studyExperimental resultWaveform

作者

M. Wilson, J. Lagowski, A. Savtchouk, L. Jastrebski, J. D'Amico, D.K. DeBusk, A. Buczkowski

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