1995 • Proceedings of ALTECH 95, vol. 95-30, pp. 73-82

New Surface Photovoltage (SPV) Method for High Precision Measurement of the Minority Carrier Diffusion Length and Surface Recombination Velocity in Silicon Wafers

主題

surface photovoltageMinority Carrier Diffusion Lengthsurface recombination velocitySilicon (Si)

V. Faifer, P. Edelman, A. Kontkiewicz, J. Lagowski, A. Hoff, V. Dyukov, A. Pravdivtsev, I. Kornienko

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