Determination of electrically Active Surface Dopant Density in Ultra-Shallow Junction (USJ) Structures with a Non-Destructive Elastic Material Probe (EM-Probe)
发布到: Ultra Shallow Junctions 2005, Daytona Beach, Florida
年: 2005
作者: R.J. Hillard, M.V. Benjamin, W.C. Ye, J.O. Borland
