Non Contact Surface Potential Measurements for Charging Reduction During Manufacturing of Metal-Insulator-Metal Capacitors

发布到: Microelectronics Reliability 41 2001) 1403

年: 2001

作者: J. Ackaert, Z. Wang, E. De Backer, P. Colson, P. Coppens

charging induced damage (CID)metal-insulator-metal-capacitor (MIMC)

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