DLS-1200 Deep Level Transient Spectroscopy

The DLS-1200 is a state-of-the art sensitivity Semilab Deep Level Transient Spectroscopic device, designed for the wafer & EPI manufacturers, IC fabs and research institutes due to recent hardware and software improvements.

Equipped with different cryostats, DLS-1200 detects and identifies electrically active impurities over wide temperature ranges on semiconductor samples. The new DLS-1200 provides the same top-tier sensitivity, low-noise and full automation, and now comes with the previously optional TAS included as a standard.

Semilab DLS-1200 is the successor of the DLS-1100 system, therefore DLS-1100 will be discontinued with the release of DLS-1200.