LEI-2000M Sheet Resistance and Mobility Measurement

Improved measurement ranges:

Wide measurement ranges with excellent repeatability

• Mobility range: 100-20.000 cm²/(V-s)

• Sheet resistance range: 0.006-3000 Ω/sq

Platform:

• 200 mm mapping stage
• Designed for ISO Class 1cleanroom without FFU
• SAM2 based software compliant to SEMI®

Options:

• Auto-loading of 100-200 mm samples, manual loading of 75 mm samples
• SECS/GEM communication capability
• OCR capability for transparent samples
• Calibration setup wafers

Measured Parameters: 

• On wide variety of compound semiconductor samples:
  GaN/AlGaN, GaAs, InP, InAs, InGaAs, Graphene, SiC

Mobility measurement:

• Microwave Hall power
• Microwave reflectance
• Sheet resistance measurement:
  HI, LO, XLO Eddy current