2008 • Meeting Abstracts - The Electrochemical Society

Application of Micro Corona-Kelvin Technique to Non-contact Monitoring of High-k MOS Capacitors

Topic

Corona-Kelvin MetrologyDielectricsNon-Contact Measurement

Anton Belyaev, Marshall Wilson, Jacek Lagowski, Lubek Jastrzebski, Andrew Findlay, J Price, CS Park, Muhammad M Hussain, G Bersuker, PS Lysaght

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