1999 • ASTM Conference on Gate Dielectric Oxide Integrity, 1999

COCOS (Corona Oxide Characterization of Semiconductor) Metrology: Physical Principles and Applications

Topic

COCOScoronaInterface Trapstress induced leakage currentiron contaminationContact Potential Difference (CPD)

M. Wilson, J. Lagowski, A. Savtchouk, L. Jastrzebski, J. D'Amico

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