1997 • International Symposium on Plasma Process-Induced Damage, 1997.

Correlation Of Nitride Spacer Plasma Damage Results From Conventional Gate Capacitor Electrical Tests And A New, Non-contact Approach

Topic

CapacitorsetchingPlasma applicationsPlasma devicesPlasma diagnosticsPlasma materials processingPlasma measurementsPlasma stabilityPulse measurementsTesting

Author

M.W. Goss, A. Findlay

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