2008 • Technical & Scientific Meeting of ARCSIS, 20-21 Nov., STUniversity in Fuveau, France 2008)

Fabrication and Characterisation Challenges on Ultra Shallow Junctions for sub 45 nm CMOS Devices

Topic

ultra-shallow junction (USJ)

Author

F. Torregrosa, H. Etienne, G. Sempere, G. Mathieu, L. Roux, C. Grosjean, R. Daineche, Y. De Puydt, L. Dupuy, P. Galand, A. Pap, K. Kis-Szabo, T. Pavelka

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