2007 • SEMI Seminars, July 17 to 19, 2007, San Francisco, USA, West Coast Junction Technology Group, USJ metrology seminar

High Resolution Mapping of Sheet Resistance Reveal Implanter or Anneal Non-Uniformities

Abstract

• Semilab’s Development of the JPVMeasurement Technique

• Simple Theory of Operation• Sample Measurements

• Performance Variation in JPV Systems

• Additional Wafer Maps• Summary

sheet resistanceultra shallow implantsjunction photovoltage technique

C. Kohn, E. Don, P. Tüttő, A. Pap, T. Pavelka