2018 • ASMC 2018 Annual Conference

Micro-Photoluminescence Imaging of Dislocation Generation in 0.18 μm Power Semiconductor Devices with Deep Trenches

Topic

Micro-Photoluminescence ImagingDislocation GenerationSemiconductor DevicesDeep TrenchesWafer Fabrication

L. Jastrzebski, G. Nadudvari, D. T. Cseh, L. Roszol, G. Molnar, I. Lajtos

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