2016 • ECS Transactions

VISZ Non-Visual Defect Monitoring with Surface Photovoltage Mapping

Topic

Non-Contact Measurementsilicon carbide (SiC)surface voltagewafer mappingnon-visual defects

Andrew David Findlay, Dmitriy Marinskiy, Piotr Edelman, Marshall Wilson, Alexandre Savtchouk, Carlos Almeida, Jacek Lagowski

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