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• 파장 범위:
• 입사각 범위(UV-VIS-NIR): 12.5°~90°
• 입사각 범위(카메라 사용 시): 25°~90°
• UV-VIS 픽셀: 1024
• NIR 픽셀: 256/512
• 일반 측정 시간: 1~10초(DUV~NIR)
• 표준 기준 물질: (Si에서 ~1200 Å SiO2)
SE-2000 분광 타원편광법
저자: Ferenc Korsós, Péter Tüttő, Ilias Saegh, Krisztián Kis-Szabó, and Attila Tóth
주제: 4pp; diffusion; junction photovoltage technique; photovoltaics; process monitoring
저자: Lenke Kócs, Borbála Tegze, Emőke Albert, Csaba Major, András Szalai, Bálint Fodor, Péter Basa, György Sáfrán, Zoltán Hórvölgyi
주제: porous silica coatings; spectroscopic ellipsometry; ELLIPSOMETRIC POROSIMETRY; mesoporous; anti-reflective coatings
저자: Baekmin Q. Kim1†, Zachariah Vicars1†, Máté Füredi2,3, Lilia F. Escobedo1, R. Bharath Venkatesh1‡, Stefan Guldin2,4,5, Amish J. Patel1*, Daeyeon Lee1
주제: spectroscopic ellipsometry
저자: P. Basa, B. Fodor, Zs. Nagy, B. Oyunbolor, A. Hajtman, S. Bordács, I. Kézsmárki, A. Halbritter, Á. Orbán
주제: ellipsometry; rotating compensator; mueller matrix; spectroscopic ellipsometer
저자: D. Le Cunff, T. Nguyen, R. Duru, F. Abbate, J. Hoglund, N. Laurent, F. Pernot, M. Wormington
주제: Ge-Si alloys; boron; elemental semiconductors; semiconductor doping; semiconductor epitaxial layers
저자: Máté Füredi, Cristina V. Manzano, András Marton, Bálint Fodor, Alberto Alvarez-Fernandez,*
주제: EP
저자: Maximiliano Jesus Jara Fornerod, Alberto Alvarez-Fernandez, Máté Füredi, Anandapadmanabhan A Rajendran, Beatriz Prieto-Simón, Nicolas H. Voelcker, Stefan Guldin
주제: spectroscopic ellipsometry
저자: László Makai, Tero Lehto, Bálint Fodor, Peter King
주제: doping; Electrical properties; spectroscopic ellipsometry; thin films; atomic layer deposition
저자: Zs.J. Horváth, P. Basa, T. Jászi, K.Z. Molnár, A.E. Pap, Gy. Molnár
저자: A. Danel, C.L. Tsai, K. Shanmugasundaram, F. Tardif, E. Kamieniecki, J. Ruzyllo
주제: Lamp cleaning; Organic contamination; Volatile contaminants; hydrocarbons
저자: Balogh Imre, Kiss Roberta Zsófia, Egri Dávid
주제: spectroscopic ellipsometry
저자: C. Talagrand, X. Boddaert, D.G. Selmeczi, C. Defranoux, P. Collot
주제: InGaZnO; spectroscopic ellipsometry; Dielectric function; Process deposition; Amorphous semiconductor
저자: Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers
주제: GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED
저자: O. Mhibik, S. Ch´enais, S. Forget, Ch. Defranoux, S. Sanaur
주제: vertically-emitting solid-state organic lasers (VECSOLs); inkjet printing; new host polymer matrix for standard laser dyes; Tunable laser
저자: Máté Füredi, Bálint Fodor, András Marton, Alberto Alvarez-Fernandez, Aysha ARiaz, Curran Kalha, Anna Regoutz, Stefan Guldin, Péter Basa
주제: Ellipsometers; ellipsometry; ellipsometry porosimetry; ELLIPSOMETRIC POROSIMETRY; ELLIPSOMETRIC POROSIMETRY (R&D); Mesoporous silica films; Porosimetry; mesoporous
저자: Emeric Balogh, Peter Basa, Attila Suto, Benjamin Powell, Anna Bölcskei-Molnár, and Szilvia Biró
주제: ellipsometry; spectroscopic ellipsometry
저자: Akshay Singh, Yifei Li, Balint Fodor, Laszlo Makai, Jian Zhou, Haowei Xu, Austin Akey, Ju Li and R. Jaramillo
주제: ellipsometry; visible spectra; Transmission electron microscopy; Density functional theory; Photonic integrated circuits; Transition metal chalcogenides; Optical metrology; Crystalline solids; Optical electronics
저자: J. Budai, B. Farkas, Z.L. Horváth, Zs. Geretovszky
주제: ellipsometry; modelling; Artifact minimization; Numerical inversion
저자: Máté Füredi, Alberto Alvarez-Fernandez, Maximiliano Jesus Jara Fornerod, Bálint Fodor, and Stefan Guldin
주제: spectroscopic ellipsometry; EP
저자: A.A. Khosroabadi, P. Gangopadhyay, B. Cocilovo, L. Makai, P. Basa, B. Duong, J. Thomas, and R.A. Norwood
주제: spectroscopic ellipsometry
저자: László Makai, Benjamin Kalas, György Tiborcz
주제: Ellipsometers; ellipsometry; Interfaces; spectroscopic ellipsometry; Surface; Surface measurement
저자: Adam J. Lovett*, Máté Füredi, Liam Bird, Samia Said, Brandon Frost, Paul R. Shearing, Stefan Guldin, Thomas S. Miller*
주제: spectroscopic ellipsometry
저자: K. Wang, B. Cheng, B. Wu, C. Defranoux, P. Basa, C. Song, G. Han, Y. Liu
주제: spectroscopic ellipsometry; Fluorinated tin oxide; Low emissivity; annealing
저자: Windisch M., Buza G., Maloveczky A., Vida Á., Selmeczi D., Dankházi Z.:
주제: Si surfaces; spectroscopic ellipsometry; surface treatment
저자: Aysha A. Riaz, Curran Kalha Maria Basso, Máté Füredi, Anna Regoutz
주제: spectroscopic ellipsometry
저자: Jialin Gu; Adam J. Lovett; Máté Füredi; Thomas Dore; Stefan Guldin; Thomas S. Miller
주제: ellipsometry; spectroscopic ellipsometry; material science; operando ellipsometry
저자: Petra Demény; Borbála Tegze; Bálint Fodor; Pál Maák; János Madarász; Zsombor Pap; Dániel Zámbó; Tamás Igricz; Adél Sarolta Rácz; Norbert Nagy; Zoltán Hórvölgyi
주제: Oxides; Metal oxide nanoparticles; Nanoparticles; Coating materials; Semiconducting nanostructured materials
저자: Péter Márton; Simon Titkó; András Marton; Bálint Fodor; Péter Basa; Gergely Stankovits; Benjámin Gyarmati; János Rohonczy; Tamás Szabó; Dániel Zámbó; Zoltán Hórvölgyi
주제: Chitosan; Mesoporous silica reservoir; Bilayer nanocoating; Rhodamine 6G; Uptake and release
저자: Máté Füredi; András Marton; József Szenka; Boglárka Dikó; Emeric Balogh; Bálint Fodor; Thomas Siefke; Péter Basa
주제: Metrology; Porosimetry; Spectroscopy; Thin films; Nanomaterials; Geometrical optics; Surface and interface chemistry; Kelvin equation
저자: László Makai; Bálint Fodor; Péter Rutka; Péter Basa; Benjámin Kalas; Alekszej Romanenko; Péter Petrik
주제: Ellipsometers; ellipsometry; Interfaces; spectroscopic ellipsometry; Surface; Surface measurement
SE-2000 분광 타원편광법
