Nanoindentation Analysis of SU-8 Coated Wafers at Different Baking Phases
Author: Tamás Tarjányi, Gábor Gulyás, Krisztián Bali, Márton Sámi, Rebeka Anna Kiss, Barbara Beiler, Péter Fürjes, Tibor Szabó
Topic: nanoindentation; hardness; creep; wafer; SU-8; epoxy

