SE-2000 Spectroscopic Ellipsometry

A Novel Pretreatment for Thin-Film Measurements

Accurate contact and contactless methods for emitter sheet resistance testing of PV wafers

Author: Ferenc Korsós, Péter Tüttő, Ilias Saegh, Krisztián Kis-Szabó, and Attila Tóth

Topic: 4pp; diffusion; junction photovoltage technique; photovoltaics; process monitoring

Ammonia-vapour-induced two-layer transformation of mesoporous silica coatings on various substrates

Author: Lenke Kócs, Borbála Tegze, Emőke Albert, Csaba Major, András Szalai, Bálint Fodor, Péter Basa, György Sáfrán, Zoltán Hórvölgyi

Topic: porous silica coatings; spectroscopic ellipsometry; ELLIPSOMETRIC POROSIMETRY; mesoporous; anti-reflective coatings

Amphiphilic nanopores that condense undersaturatedwater vapor and exude water droplets

Author: Baekmin Q. Kim1†, Zachariah Vicars1†, Máté Füredi2,3, Lilia F. Escobedo1, R. Bharath Venkatesh1‡, Stefan Guldin2,4,5, Amish J. Patel1*, Daeyeon Lee1

Topic: spectroscopic ellipsometry

Analysis of malaria infection byproducts with Mueller matrix transmission ellipsometry

Author: P. Basa, B. Fodor, Zs. Nagy, B. Oyunbolor, A. Hajtman, S. Bordács, I. Kézsmárki, A. Halbritter, Á. Orbán

Topic: ellipsometry; rotating compensator; mueller matrix; spectroscopic ellipsometer

Benefit of Combining Metrology Techniques for Thin SiGe:B Layers

Author: D. Le Cunff, T. Nguyen, R. Duru, F. Abbate, J. Hoglund, N. Laurent, F. Pernot, M. Wormington

Topic: Ge-Si alloys; boron; elemental semiconductors; semiconductor doping; semiconductor epitaxial layers

Beyond the Meso-/Macroporous boundary: Extending Capillary Condensation-based Pore Size Characterization in Thin Films Through Tailored Adsorptives

Author: Máté Füredi, Cristina V. Manzano, András Marton, Bálint Fodor, Alberto Alvarez-Fernandez,*

Topic: EP

Block copolymer-assembled nanopore arrays enable ultrasensitive label-free DNA detection

Author: Maximiliano Jesus Jara Fornerod, Alberto Alvarez-Fernandez, Máté Füredi, Anandapadmanabhan A Rajendran, Beatriz Prieto-Simón, Nicolas H. Voelcker, Stefan Guldin

Topic: spectroscopic ellipsometry

Breakthrough instruments and products: Investigation of atomic layer deposited Al:ZnO layer by spectroscopic ellipsometry from the deep-UV to the mid-IR in one instrument

Author: László Makai, Tero Lehto, Bálint Fodor, Peter King

Topic: doping; Electrical properties; spectroscopic ellipsometry; thin films; atomic layer deposition

Charging Behavior of Silicon Nitride Based Non-Volatile Memory Structures with Embedded Semiconductor Nanocrystals

Author: Zs.J. Horváth, P. Basa, T. Jászi, K.Z. Molnár, A.E. Pap, Gy. Molnár

Cleaning of Si Surfaces by Lamp Illumination

Author: A. Danel, C.L. Tsai, K. Shanmugasundaram, F. Tardif, E. Kamieniecki, J. Ruzyllo

Topic: Lamp cleaning; Organic contamination; Volatile contaminants; hydrocarbons

Detection of structural asymmetries in Forksheet FET arrays using Mueller matrix ellipsometry, a theoretical study

Author: Balogh Imre, Kiss Roberta Zsófia, Egri Dávid

Topic: spectroscopic ellipsometry

Ellipsometry Study of Process Deposition of Amorphous Indium Gallium Zinc Oxide Sputtered Thin Films

Author: C. Talagrand, X. Boddaert, D.G. Selmeczi, C. Defranoux, P. Collot

Topic: InGaZnO; spectroscopic ellipsometry; Dielectric function; Process deposition; Amorphous semiconductor

Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers

Author: Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers

Topic: GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED

Inkjet-Printed Vertically Emitting Solid-State Organic Lasers

Author: O. Mhibik, S. Ch´enais, S. Forget, Ch. Defranoux, S. Sanaur

Topic: vertically-emitting solid-state organic lasers (VECSOLs); inkjet printing; new host polymer matrix for standard laser dyes; Tunable laser

Internal wettability investigation of mesoporous silica materials by ellipsometric porosimetry

Author: Máté Füredi, Bálint Fodor, András Marton, Alberto Alvarez-Fernandez, Aysha ARiaz, Curran Kalha, Anna Regoutz, Stefan Guldin, Péter Basa

Topic: Ellipsometers; ellipsometry; ellipsometry porosimetry; ELLIPSOMETRIC POROSIMETRY; ELLIPSOMETRIC POROSIMETRY (R&D); Mesoporous silica films; Porosimetry; mesoporous

Monitoring subwavelength grating structures for vertical-cavity surface-emitting laser applications by spectroscopic ellipsometry

Author: Emeric Balogh, Peter Basa, Attila Suto, Benjamin Powell, Anna Bölcskei-Molnár, and Szilvia Biró

Topic: ellipsometry; spectroscopic ellipsometry

Near-infrared optical properties and proposed phase-change usefulness of transition metal disulfides

Author: Akshay Singh, Yifei Li, Balint Fodor, Laszlo Makai, Jian Zhou, Haowei Xu, Austin Akey, Ju Li and R. Jaramillo

Topic: ellipsometry; visible spectra; Transmission electron microscopy; Density functional theory; Photonic integrated circuits; Transition metal chalcogenides; Optical metrology; Crystalline solids; Optical electronics

On Determining the Optical Properties and Layer Structure from Spectroscopic Ellipsometric Data using Automated Artifact Minimization Method

Author: J. Budai, B. Farkas, Z.L. Horváth, Zs. Geretovszky

Topic: ellipsometry; modelling; Artifact minimization; Numerical inversion

On the Rational Design of Mesoporous Silica Humidity Sensors

Author: Máté Füredi, Alberto Alvarez-Fernandez, Maximiliano Jesus Jara Fornerod, Bálint Fodor, and Stefan Guldin

Topic: spectroscopic ellipsometry; EP

Spectroscopic Ellipsometry on Metal and Metal-Oxide Multilayer Hybrid Plasmonic Nanostructures

Author: A.A. Khosroabadi, P. Gangopadhyay, B. Cocilovo, L. Makai, P. Basa, B. Duong, J. Thomas, and R.A. Norwood

Topic: spectroscopic ellipsometry

Spectroscopic ellipsometry investigation of free liquid-liquid and liquid-air interfaces

Author: László Makai, Benjamin Kalas, György Tiborcz

Topic: Ellipsometers; ellipsometry; Interfaces; spectroscopic ellipsometry; Surface; Surface measurement

Structural Evolution of Silicon Nitride Anodes during Electrochemical Lithiation

Author: Adam J. Lovett*, Máté Füredi, Liam Bird, Samia Said, Brandon Frost, Paul R. Shearing, Stefan Guldin, Thomas S. Miller*

Topic: spectroscopic ellipsometry

Study of Annealing Effects Upon the Optical and Electrical Properties of SnO2:F/SiCxOy Low Emissivity Coatings by Spectroscopic Ellipsometry

Author: K. Wang, B. Cheng, B. Wu, C. Defranoux, P. Basa, C. Song, G. Han, Y. Liu

Topic: spectroscopic ellipsometry; Fluorinated tin oxide; Low emissivity; annealing

Szilicium felületkezelése femtoszekundomos lézerrel (Surface treatment using femtosecond laser technology)

Author: Windisch M., Buza G., Maloveczky A., Vida Á., Selmeczi D., Dankházi Z.:

Topic: Si surfaces; spectroscopic ellipsometry; surface treatment

The influence of stabiliser concentration on the formation of In2O3 thin films

Author: Aysha A. Riaz, Curran Kalha Maria Basso, Máté Füredi, Anna Regoutz

Topic: spectroscopic ellipsometry

Tracking Lithium Intercalation in Battery Electrodes via Their Electrochromic Properties Using Operando Ellipsometry

Author: Jialin Gu; Adam J. Lovett; Máté Füredi; Thomas Dore; Stefan Guldin; Thomas S. Miller

Topic: ellipsometry; spectroscopic ellipsometry; material science; operando ellipsometry

Titania-Supported Photocatalytic Coatings of Cu2O Nanoparticles Synthesized via Heterogeneous Nucleation

Author: Petra Demény; Borbála Tegze; Bálint Fodor; Pál Maák; János Madarász; Zsombor Pap; Dániel Zámbó; Tamás Igricz; Adél Sarolta Rácz; Norbert Nagy; Zoltán Hórvölgyi

Topic: Oxides; Metal oxide nanoparticles; Nanoparticles; Coating materials; Semiconducting nanostructured materials

Model investigation of a consecutive dye uptake and release process by using a bilayered chitosan-mesoporous silica nanocoating system

Author: Péter Márton; Simon Titkó; András Marton; Bálint Fodor; Péter Basa; Gergely Stankovits; Benjámin Gyarmati; János Rohonczy; Tamás Szabó; Dániel Zámbó; Zoltán Hórvölgyi

Topic: Chitosan; Mesoporous silica reservoir; Bilayer nanocoating; Rhodamine 6G; Uptake and release

Vapor sorption-based critical dimension metrology for uniaxial anisotropic nanopatterns

Author: Máté Füredi; András Marton; József Szenka; Boglárka Dikó; Emeric Balogh; Bálint Fodor; Thomas Siefke; Péter Basa

Topic: Metrology; Porosimetry; Spectroscopy; Thin films; Nanomaterials; Geometrical optics; Surface and interface chemistry; Kelvin equation

Spectroscopic Ellipsometry Investigations on Organic/Inorganic Liquid Surfaces in Mid-IR Range

Author: László Makai; Bálint Fodor; Péter Rutka; Péter Basa; Benjámin Kalas; Alekszej Romanenko; Péter Petrik

Topic: Ellipsometers; ellipsometry; Interfaces; spectroscopic ellipsometry; Surface; Surface measurement