IEEE Photovoltaic Specialists Conference, IEEE NewYork 2000.) p 99.2000
Lifetime mapping of Si Wafers by an Infrared Camera
Author: M. Bail, J. Kentsch, R. Brendel, M. Schulz
Topic: carrier lifetime; infrared camera
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• Accurate sheet resistance measurement for thin film semiconductor, TCO, and metal layers
• Sample materials: Si, epitaxial layers, metal/implanted layers on Si
• Sheet resistance measurement of emitter layers in solar cells.
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